Glow discharge processes : sputtering and plasma etching / Brian Chapman
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Personal Name(s): | Chapman, Brian N. |
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Imprint: |
New York :
Wiley,
1980
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Physical Description: |
XV, 406 S. |
Note: |
"A Wiley-Interscience publication." Includes index englisch |
ISBN: |
047107828X 9780471078289 |
Keywords: |
etching : plasma |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
ZB | |
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Reading Room Call number: FGK 047 Barcode: 1086001936 Available | |
Reading Room Call number: FGK 047 Barcode: 1210102371 Available | |
IEK-4 | |
Institute Call number: B 051706'01' Barcode: 1081000728 Available | |
Institute Call number: B 051706'01' Barcode: 1086000086 Available | |
Institute Call number: B 051706'01' Barcode: 1087103353 Available |