MOCVD of high-K ceramic thin films for the Gbit DRAM technology [E-Book] / Fotios Fitsilis
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Full text http://hdl.handle.net/2128/177 |
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Personal Name(s): | Fitsilis, Fotios, author |
Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
2002
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Physical Description: |
1 Online-Ressource (II, 136 Seiten) |
Note: |
englisch |
Series Title: |
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Berichte des Forschungszentrums Jülich ;
4001 |
Dissertation Note: |
Zugleich: Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen, 2002
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Subject (ZB): | |
Classification: |
Description not available. |