Untersuchung der Inselbildung im System SiGe/Si [E-Book] / Michael Goryll
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Full text JuSER |
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Personal Name(s): | Goryll, Michael, author |
Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
1998
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Physical Description: |
1 Online-Ressource (VIII, 154 Seiten) |
Note: |
deutsch Zugleich: Diplomarbeit |
Series Title: |
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Berichte des Forschungszentrums Jülich ;
3461 |
Keywords: |
investigation of island growth in the system SiGe/Si film morphology |
Subject (ZB): | |
Classification: |
Description not available. |