Verwendbarkeit von N2 als Trägergas bei der Niedrigdruck- Gasphasenepitaxie von GaAs and Al(x)Ga(1-x)As [E-Book] / Martin Hollfelder
applicability of nitrogen (n2) as carrier gas in lwo pressure gas phase epitaxy (lp- movpe) of gaas and al(x)ga(1-x)as
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Full text JuSER |
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Personal Name(s): | Hollfelder, Martin, author |
Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
1993
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Physical Description: |
1 Online-Ressource (VI, 98 Seiten) |
Note: |
deutsch |
Series Title: |
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Berichte des Forschungszentrums Jülich ;
2713 |
Subject (ZB): | |
Classification: |
applicability of nitrogen (n2) as carrier gas in lwo pressure gas phase epitaxy (lp- movpe) of gaas and al(x)ga(1-x)as |