Untersuchungen zur physikalischen Zerstäubung an amorphen Kohlenstoffschichten mittels laserinduzierter Fluoreszenz [E-Book] / Ekkehard Pasch
study of physical sputtering on amorphous carbon layers by laser induced fluorescence
Saved in:
Full text JuSER |
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Personal Name(s): | Pasch, Ekkehard, author |
Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
1992
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Physical Description: |
1 Online-Ressource (118 Seiten) |
Note: |
deutsch |
Series Title: |
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Berichte des Forschungszentrums Jülich ;
2647 |
Dissertation Note: |
Zugleich: Dissertation, Universität Gesamthochschule Essen
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Subject (ZB): | |
Classification: |
study of physical sputtering on amorphous carbon layers by laser induced fluorescence |