The production of nanometre structures in inorganic materials by electron beams of high current density.
production of nanometer scale holes and lines in thin films of inorganic materials using electron beams
Saved in:
Personal Name(s): | MacAulay, J. M. |
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Imprint: |
Cambridge :
University of Cambridge,
1989.
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Physical Description: |
128 Bl. |
Note: |
englisch |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: B 069816'01' Barcode: 1091104804 Available |