Introduction to microlithography.
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Personal Name(s): | Thompson, L. F., editor |
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Edition: |
2. ed. |
Imprint: |
Washington, DC :
American Chemical Society,
1994.
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Physical Description: |
XIV, 527 S. |
Note: |
englisch |
ISBN: |
9780841228481 0841228485 |
Series Title: |
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ACS professional reference book.
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Reading Room Call number: FGM 078 Barcode: 1095104086 Available |