APA Citation

Elkareh, B. (1995). Fundamentals of semiconductor processing technology. Boston, MA: Kluwer Academic Publ..

Chicago Style Citation

Elkareh, B. Fundamentals of Semiconductor Processing Technology. Boston, MA: Kluwer Academic Publ., 1995.

MLA Citation

Elkareh, B. Fundamentals of Semiconductor Processing Technology. Boston, MA: Kluwer Academic Publ., 1995.

Warning: These citations may not always be 100% accurate.