Elkareh, B. (1995). Fundamentals of semiconductor processing technology. Boston, MA: Kluwer Academic Publ..
Chicago Style CitationElkareh, B. Fundamentals of Semiconductor Processing Technology. Boston, MA: Kluwer Academic Publ., 1995.
MLA CitationElkareh, B. Fundamentals of Semiconductor Processing Technology. Boston, MA: Kluwer Academic Publ., 1995.
Warning: These citations may not always be 100% accurate.