Chemical vapour deposition : precursors, processes and applications / edited by Anthony C. Jones, Michael L. Hitchman [E-Book]
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Full text |
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Personal Name(s): | Jones, Anthony C. |
Hitchman, Michael L. | |
Imprint: |
Cambridge, UK :
Royal Society of Chemistry,
c2009
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Physical Description: |
1 online resource |
Note: |
englisch |
ISBN: |
9781847558794 0854044655 9780854044658 1621987035 1847558798 9781621987031 |
Subject (LOC): |
Description not available. |