Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
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Personal Name(s): | Srolovitz, D. J., editor |
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Imprint: |
Pittsburgh, PA :
Materials Research Society,
1995.
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Physical Description: |
XI, 382 S. |
Note: |
englisch |
ISBN: |
1558992928 9781558992924 |
Series Title: |
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Materials Research Society symposium proceedings ;
389. |
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