Micro system technologies 1991 : International conference on micro electro, opto, mechanic systems and components 0002 : Micro system technologies: international conference 0002 : Berlin, 29.10.91-01.11.91.
microtechnology:
Saved in:
Personal Name(s): | Krahn, R., editor |
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Imprint: |
Berlin :
VDE Verl.,
1991.
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Physical Description: |
552 S. |
Note: |
englisch |
ISBN: |
3800718197 9783800718191 |
Series Title: |
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International Conference on Micro Electro, Opto, Mechanical Systems and Components ;
0002. |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: S 007576-0002'01' Barcode: 1094101227 Available |