Materials aspects of x-ray lithography : Symposium on materials aspects of x-ray lithography: papers : MRS spring meeting : San-Francisco, CA, 12.04.93-14.04.93.
Materials aspects of x-ray lithography :
Saved in:
Personal Name(s): | Celler, G. K., editor |
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Imprint: |
Pittsburgh, PA :
Materials Research Society,
1993.
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Physical Description: |
XI, 291 S. |
Note: |
englisch |
ISBN: |
9781558992023 1558992022 |
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Materials Research Society symposium proceedings ;
306. |
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ZB | |
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Reading Room Call number: FAF 007-306 Barcode: 1093103974 Available |