Novel silicon based technologies : NATO advanced study institute on novel silicon based technologies: proceedings : Boca-Raton, FL, 17.07.89-28.07.89.
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Personal Name(s): | Levy, R. A., editor |
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Imprint: |
Dordrecht :
Kluwer Academic Publ.,
1991.
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Physical Description: |
XII, 277 S. |
Note: |
englisch |
ISBN: |
0792311124 9780792311126 |
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NATO ASI series. E. Applied sciences
vol 0193. |
Keywords: |
gallium arsenide on silicon: device applications ion beam synthesis in silicon ion beam processing of chemical vapor deposited silicon layers technology and devices for silicon based three- dimensional circuits integrated fabrication of micromechanical structures on silicon micromachining of silicon for sensors integrated photonic circuits on silicon principles and implementation of artificial neural networks |
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Reading Room Call number: FGM 073 Barcode: 1092102172 Available |