Polymers in microlithography: materials and processes : Polymers in microlithography: materials and processes: symposium : National meeting of the American Chemical Society. 0197 : Dallas, TX, 09.04.89-14.04.89.
Polymers in microlithography :
Saved in:
Personal Name(s): | Reichmanis, E., editor |
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Imprint: |
Washington, DC :
American Chemical Society,
1989.
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Physical Description: |
XII, 449 S. |
Note: |
englisch |
ISBN: |
0841217017 9780841217010 |
Series Title: |
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ACS symposium series ;
vol 0412. |
Keywords: |
polymers in microlithography: an overview |
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Classification: | |
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Reading Room Call number: FGM 103 Barcode: 1090103657 Available |