Optical/laser microlithography. 0002 : Optical/laser microlithography. 0002: conference : San-Jose, CA, 01.03.89-03.03.89.
laser optical microlithography :
Saved in:
Personal Name(s): | Lin, B. J., editor |
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Imprint: |
Bellingham, WA :
SPIE-The International Society for Optical Engineering,
1989.
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Physical Description: |
VIII, 572 S. |
Note: |
englisch |
ISBN: |
9780819401236 0819401234 |
Series Title: |
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SPIE proceedings ;
vol 1088. |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: S 002308-1088'01' Barcode: 1090102633 Available |