Advances in resist technology and processing. 0005: conference : Santa-Clara, CA, 29.02.88-02.03.88.
properties and processing of photoresists
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Personal Name(s): | MacDonald, S. A., editor |
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Imprint: |
Bellingham, WA :
International Society for Optical Engineering,
1988.
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Physical Description: |
VIII, 449 S. |
Note: |
englisch |
ISBN: |
9780892529551 0892529555 |
Series Title: |
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Proceedings of SPIE-The International Society for Optical Engineering ;
vol 0920. |
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ZB | |
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Open Stacks Call number: S 002308-0920'01' Barcode: 1089103593 Available |