Silicon processing : Symposium on silicon processing : San-Jose, CA, 19.01.82-22.01.82.
Saved in:
Personal Name(s): | Gupta, D. C., editor |
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Imprint: |
Philadelphia, PA :
American Society for Testing and Materials,
1983.
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Physical Description: |
559 S. |
Note: |
englisch |
Series Title: |
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ASTM special technical publication ;
vol 0804. |
Keywords: |
silicon : semiconductor processing : semiconductor epitaxy |
Classification: | |
Shelf Classification: |
ZB | |
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Reading Room Call number: FGC 092 Barcode: 1087000109 Available |