Submicron lithography : Santa-Clara, CA, 29.03.1982-30.03.1982 / P. D. Blais Hrsg.
Saved in:
Personal Name(s): | Blais, P. D., editor |
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Imprint: |
Bellingham, WA :
SPIE-The International Society for Optical Engineering,
1982
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Physical Description: |
VIII, 179 Bl. |
Note: |
englisch |
ISBN: |
0892523689 9780892523689 |
Series Title: |
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Proceedings of SPIE-The International Society for Optical Engineering ;
333 |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: S 002308-0333'01' Barcode: 1087002668 Available |