Microcircuit engineering 1986 : ME 1986 : proceedings of the International Conference on Microlithography : Interlaken, September 23 - 25, 1986 / ed. by H. W. Lehmann.
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Personal Name(s): | Lehmann, H. W., Hrsg,. |
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Amsterdam :
North Holland,
1986.
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Physical Description: |
605 S. |
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englisch |
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Microelectronic engineering ;
5. |
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ZB | |
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Reading Room Call number: FGM 088-1986 Barcode: 9944034056 Available |