Nanofabrication [E-Book] : Principles and Applications / by Christo Papadopoulos.
This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated...
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Full text |
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Personal Name(s): | Papadopoulos, Christo, author |
Imprint: |
Cham :
Springer,
2016
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Physical Description: |
VI, 81 p. 41 illus., 31 illus. in color. online resource. |
Note: |
englisch |
ISBN: |
9783319317427 |
DOI: |
10.1007/978-3-319-31742-7 |
Series Title: |
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SpringerBriefs in Materials
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Subject (LOC): |
- Introduction
- Silicon Planar Processing and Photolithography
- Direct-write Lithography Approaches
- Stamping Methods
- Scanning-probe Methods
- Natural Lithography
- Direct-Growth and Self-assembly
- Practical Examples and Case Studies of Nanofabrication.