Principles and Applications of NanoMEMS Physics [E-Book] / by Héctor J. De Los Santos.
Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fa...
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Full text |
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Personal Name(s): | Santos, Héctor J. De Los. author |
Imprint: |
Boston, MA :
Springer US,
2005
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Physical Description: |
XVI, 254 p. online resource. |
Note: |
englisch |
ISBN: |
9780387258348 |
DOI: |
10.1007/b136228 |
Series Title: |
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Microsystems ;
15 |
Subject (LOC): |
- Nanoelectromechanical Systems
- Nanomes Physics: Quantum Wave-Particle Phenomena
- Nanomems Physics: Quantum Wave Phenomena
- Nanomems Applications: Circuits and Systems
- Nanomems Applications: Photonics.