Principles and Applications of NanoMEMS Physics [E-Book] / by Héctor J. De Los Santos.
Santos, Héctor J. De Los. (author)
Boston, MA : Springer US, 2005
XVI, 254 p. online resource.
englisch
9780387258348
10.1007/b136228
Microsystems ; 15
Full Text
Table of Contents:
  • Nanoelectromechanical Systems
  • Nanomes Physics: Quantum Wave-Particle Phenomena
  • Nanomems Physics: Quantum Wave Phenomena
  • Nanomems Applications: Circuits and Systems
  • Nanomems Applications: Photonics.