Low Pressure Plasmas and Microstructuring Technology [E-Book] / by Gerhard Franz.
This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electr...
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Full text |
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Personal Name(s): | Franz, Gerhard. author |
Imprint: |
Berlin, Heidelberg :
Springer,
2009
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Physical Description: |
XXIV, 732 p. 422 illus. online resource. |
Note: |
englisch |
ISBN: |
9783540858492 |
DOI: |
10.1007/978-3-540-85849-2 |
Subject (LOC): |
- Collisions and cross sections
- The plasma
- DC discharges
- High-frequency discharges I
- High-frequency discharges II
- High-frequency discharges III
- Ion beam systems
- Plasma diagnostics
- Plasma deposition processes
- Plasma etch processes
- Etch Mechanisms
- Outlook
- Advanced Topics.