Practical Scanning Electron Microscopy [E-Book] : Electron and Ion Microprobe Analysis / edited by Joseph I. Goldstein, Harvey Yakowitz.
In the spring of 1963, a well-known research institute made a market survey to assess how many scanning electron microscopes might be sold in the United States. They predicted that three to five might be sold in the first year a commercial SEM was available, and that ten instruments would saturate t...
Saved in:
Full text |
|
Personal Name(s): | Goldstein, Joseph I., editor |
Yakowitz, Harvey, editor | |
Imprint: |
Boston, MA :
Springer,
1975
|
Physical Description: |
XVIII, 582 p. online resource. |
Note: |
englisch |
ISBN: |
9781461344223 |
DOI: |
10.1007/978-1-4613-4422-3 |
Subject (LOC): |
- I Introduction
- I. Evolution of the Scanning Electron Microscope
- II. Evolution of the Electron Probe Microanalyzer
- III. Combination SEM-EPMA
- IV. Outline and Purpose of This Book
- References
- Bibliography of Texts and Monographs in SEM and EPMA
- II Electron Optics
- I. Electron Guns
- II. Electron Lenses
- III. Electron Probe Diameter dp vs. Electron Probe Current i
- IV. Depth of Field
- References
- III Electron Beam-Specimen Interaction
- I. Electron Scattering in Solids
- II. Electron Range and Spatial Distribution of the Primary Electron Beam
- III. Emitted Electrons—Backscattered Electrons
- IV. Emitted Electrons—Low-Energy Electrons
- V. X-Rays
- VI. Auger Electrons
- VII. Summary—Range and Spatial Resolution
- References
- IV Image Formation in the Scanning Electron Microscope
- I. The SEM Imaging Process
- II. Signal Detectors
- III. Contrast Formation
- IV. Signal Characteristics and Image Quality
- V. Resolution Limitations in the SEM
- VI. Signal Processing
- VII. Image Defects
- VIII. Electron Penetration Effects in Images
- References
- V Contrast Mechanisms of Special Interest In Materials Science
- I. Introduction
- II. Electron Channeling Contrast
- III. Magnetic Contrast in the SEM
- IV. Voltage Contrast
- V. Electron-Beam-Induced Current (EBIC)
- VI. Cathodoluminescence
- References
- VI Specimen Preparation, Special Techniques, and Applications of the Scanning Electron Microscope
- I. Specimen Preparation for Materials Examination in the SEM
- II. Stereomicroscopy
- III. Dynamic Experiments in the SEM
- IV. Applications of the SEM
- References
- VII X-Ray Spectral Measurement and Interpretation
- I. Introduction
- II. Crystal Spectrometers
- III. Solid State X-Ray Detectors
- IV. A Comparison of Crystal Spectrometers with Solid State X-Ray Detectors
- V. The Analysis of X-Ray Spectral Data
- References
- VIII Microanalysis of Thin Films and Fine Structure
- I. Introduction
- II. Factors Affecting X-Ray Spatial Resolution
- III. Characterizing the X-Ray-Excited Volume
- IV. Thin-Film Analysis
- V. Particles, Inclusions, and Fine Structures
- References
- IX Methods of Quantitative X-Ray Analysis Used in Electron Probe Microanalysis and Scanning Electron Microscopy
- I. Introduction
- II. The Absorption Factor kA
- III. Atomic Number Correction kZ
- IV. The Characteristic Fluorescence Correction kF
- V. The Continuum Fluorescence Correction
- VI. Summary Discussion of the ZAF Method
- VII. The Empirical Method for Quantitative Analysis
- VIII. Comments on Analysis Involving Elements of Atomic Number of 11 or Less
- IX. Quantitative Analysis with Nonnormal Electron-Beam Incidence
- X. Analysis Involving Special Specimen Geometries
- XI. Discussion
- Appendix. The Analysis of an Iron-Silicon Alloy
- References
- X Computational Schemes for Quantitative X-Ray Analysis: On-Line Analysis with Small Computers
- I. Introduction
- II. Summary of Computational Schemes for Quantitative Analysis
- III. The FRAME Program
- IV. Data Reduction Based on the Hyperbolic Method
- V. Summary
- References
- XI Practical Aspects of X-Ray Microanalysis
- I. Grappling with the Unknown
- II. Specimen Preparation for Quantitative Analysis
- III. Applications Involving Compositional Analysis
- References
- XII Special Techniques in the X-Ray Analysis of Samples
- I. Light Element Analysis
- II. Precision and Sensitivity in X-Ray Analysis
- III. X-Ray Analysis at Interfaces
- IV. Soft X-Ray Emission Spectra
- V. Thin Films
- Appendix. Deconvolution Technique
- References
- XIII Biological Applications: Sample Preparation and Quantitation
- I. Sample Preparation
- II. Analysis
- III. Summary
- References
- XIV Ion Microprobe Mass Analysis
- I. Basic Concepts and Instrumentation
- II. Ion Microscope
- III. Ion Microprobe
- IV. Production of Ions
- V. Sputtering
- VI. Qualitative Analysis
- VII. Quantitative Analysis
- VIII. Dead-Time Losses
- IX. In-Depth Profiling
- X. Applications
- References.