Plasma Chemistry III [E-Book] / edited by Stanislav Vepřek, Mundiyath Venugopalan.
Saved in:
Full text |
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Personal Name(s): | Venugopalan, Mundiyath, editor |
Vepřek, Stanislav, editor | |
Imprint: |
Berlin, Heidelberg :
Springer,
1980
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Physical Description: |
IV, 132 p. 14 illus. online resource. |
Note: |
englisch |
ISBN: |
9783540382645 |
DOI: |
10.1007/BFb0048584 |
Series Title: |
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Topics in Current Chemistry ;
94 |
Subject (LOC): |
- Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization
- The Mechanism and kinetics of plasma polymerization
- Elementary processes at solid surfaces immersed in low pressure plasmas.