Electron Beam Testing Technology [E-Book] / edited by John T. L. Thong.
Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being...
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Full text |
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Personal Name(s): | Thong, John T. L., editor |
Imprint: |
Boston, MA :
Springer,
1993
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Physical Description: |
XVI, 462 p. online resource. |
Note: |
englisch |
ISBN: |
9781489915221 |
DOI: |
10.1007/978-1-4899-1522-1 |
Series Title: |
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Microdevices, Physics and Fabrication Technologies
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Subject (LOC): |
- Background to Electron Beam Testing Technology
- I
- 1. Introduction
- 2. Principles and Applications
- II
- 3. Essential Electron Optics
- 4. Electron Beam Interaction with Specimen
- 5. Electron Spectrometers and Voltage Measurements
- 6. High-Speed Techniques
- 7. Picosecond Photoemission Probing
- 8. Signal and Image Processing
- III
- 9. System Integration
- 10. Practical Considerations in Electron Beam Testing
- 11. Industrial Case Studies.