Sputtering by Particle Bombardment I [E-Book] : Physical Sputtering of Single-Element Solids / edited by Rainer Behrisch.
Saved in:
Full text |
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Personal Name(s): | Behrisch, Rainer, editor |
Imprint: |
Berlin, Heidelberg :
Springer,
1981
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Physical Description: |
XI, 284 p. 19 illus. online resource. |
Note: |
englisch |
ISBN: |
9783540385141 |
DOI: |
10.1007/3-540-10521-2 |
Series Title: |
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Topics in Applied Physics ;
47 |
Subject (LOC): |
- and overview
- Sputtering by ion bombardment theoretical concepts
- Theoretical aspects of monocrystal sputtering
- Sputtering yield measurements
- Sputtering yields of single crystalline targets.