Sputtering by Particle Bombardment III [E-Book] : Characteristics of Sputtered Particles, Technical Applications / edited by Rainer Behrisch, Klaus Wittmaack.
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputterin...
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Full text |
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Personal Name(s): | Behrisch, Rainer, editor |
Wittmaack, Klaus, editor | |
Imprint: |
Berlin, Heidelberg :
Springer,
1991
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Physical Description: |
XV, 415 p. 66 illus. online resource. |
Note: |
englisch |
ISBN: |
9783540468813 |
DOI: |
10.1007/3-540-53428-8 |
Series Title: |
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Topics in Applied Physics ;
64 |
Subject (LOC): |
- Angular, energy, and mass distribution of sputtered particles
- Charged and excited states of sputtered atoms
- Surface and depth analysis based on sputtering
- Desorption of organic molecules from solid and liquid surfaces induced by particle impact
- Production of microstructures by ion beam sputtering
- Production of thin films by controlled deposition of sputtered material.