High-Resolution X-Ray Scattering from Thin Films and Multilayers [E-Book] / by Václav Holý, Ullrich Pietsch, Tilo Baumbach.
This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dy...
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Full text |
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Personal Name(s): | Holý, Václav, author |
Baumbach, Tilo, author / Pietsch, Ullrich, author | |
Imprint: |
Berlin, Heidelberg :
Springer,
1999
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Physical Description: |
XI, 258 p. 140 illus. online resource. |
Note: |
englisch |
ISBN: |
9783540496250 |
DOI: |
10.1007/BFb0109385 |
Series Title: |
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Springer Tracts in Modern Physics ;
149 |
Subject (LOC): |
- Basic elements of the equipment
- Diffractometers and reflectometers
- Scans and resolution in angular and reciprocal space
- Basic principles
- Kinematical scattering theory
- Dynamical scattering theory
- Layer thicknesses of single layers and multilayers
- Lattice parameters and lattice strains in single expitaxial layers
- Volume defects in layers
- X-ray reflection by rough multilayers
- X-ray scattering by gratings and dots
- A. Wave vectors and amplitudes of the internal wavefields in a dynamically scattering crystal.