Microelectronics processing: chemical engineering aspects / ed. D. W. Hess
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Personal Name(s): | Hess, D. W., editor |
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Imprint: |
Washington, DC :
American Chemical Society,
1989
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Physical Description: |
XIV, 547 S. |
Note: |
englisch |
ISBN: |
0841214751 9780841214750 |
Series Title: |
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Advances in chemistry series ;
221 |
Keywords: |
microelectronics processing theory of transport processes in semiconductor crystal growth from the melt liquid phase epitaxy and phase diagrams of compound semiconductors physical vapor deposition reactors chemical vapor deposition diffusion and oxidation of silicon resists in microlithography plasma enhanced etching and deposition interconnection and packaging of high performance integrated circuits semiconductor processing problems solved by wet (solution) chemistry |
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Reading Room Call number: FGM 070 Barcode: 1091103357 Available |