Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties [E-Book] / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
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Full text |
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Personal Name(s): | Ree, Moonhor. |
Yoon, Jinhwan. / Heo, Kyuyoung. | |
Imprint: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010
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Physical Description: |
67 pages : illustrations |
Note: |
englisch |
Series Title: |
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Nanotechnology science and technology
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Subject (LOC): |
Description not available. |