From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications / Marc J. Madou
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Table of Contents |
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Personal Name(s): | Madou, Marc J., author |
Edition: |
Third edition |
Imprint: |
Boca Raton, Fla. :
CRC Press,
2012
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Physical Description: |
XIII, 636 Seiten |
Note: |
englisch |
ISBN: |
9781420055160 |
Series Title: |
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Fundamentals of microfabrication and nanotechnology ;
3 |
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Reading Room Call number: FGN 209-03 Barcode: 1219101242 Available |