Impurity doping processes in silicon.
Saved in:
Personal Name(s): | Wang, Franklin F. Y., editor |
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Imprint: |
Amsterdam :
North Holland,
1981.
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Physical Description: |
643 S. |
Note: |
englisch |
ISBN: |
9780444860958 0444860959 |
Series Title: |
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Materials processing ;
Volume 0002. |
Keywords: |
silicon : crystal doping : ion implantation : molecular beam epitaxy : chemical vapor deposition : doping profile |
Classification: | |
Shelf Classification: |
ZB | |
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Reading Room Call number: FGC 082 Barcode: 1081004650 Available |