This title appears in the Scientific Report :
2010
Please use the identifier:
http://dx.doi.org/10.1016/j.tsf.2010.02.065 in citations.
Influence of working pressure on ZnO:Al films from tube targets for silicon thin film solar cells
Influence of working pressure on ZnO:Al films from tube targets for silicon thin film solar cells
Mid-frequency magnetron sputtering of aluminum doped zinc oxide films (ZnO:Al) from tube ceramic targets has been investigated for silicon based thin film solar cell applications. The influence of working pressure on structural, electrical, and optical properties of sputtered ZnO:Al films was studie...
Saved in:
Personal Name(s): | Zhu, H. |
---|---|
Hüpkes, J. / Bunte, E. / Gerber, A. / Huang, S. | |
Contributing Institute: |
Photovoltaik; IEF-5 |
Published in: | Thin solid films, 518 (2010) S. 4997 - 5002 |
Imprint: |
Amsterdam [u.a.]
Elsevier
2010
|
Physical Description: |
4997 - 5002 |
DOI: |
10.1016/j.tsf.2010.02.065 |
Document Type: |
Journal Article |
Research Program: |
Erneuerbare Energien |
Series Title: |
Thin Solid Films
518 |
Subject (ZB): | |
Publikationsportal JuSER |
Mid-frequency magnetron sputtering of aluminum doped zinc oxide films (ZnO:Al) from tube ceramic targets has been investigated for silicon based thin film solar cell applications. The influence of working pressure on structural, electrical, and optical properties of sputtered ZnO:Al films was studied. ZnO:Al thin films with a minimum resistivity of 3.4x10(-4) Omega cm, high mobility of 50 cm(2)/Vs, and high optical transmission close to 90% in visible spectrum region were achieved. The surface texture of ZnO:Al films after a chemical etching step was investigated. A gradual increase in feature sizes (diameter and depth) was observed with increasing sputter pressure. Silicon based thin film solar cells were prepared using the etched ZnO:Al films as front contacts. Energy conversion efficiencies of up to 10.2% were obtained for amorphous/microcrystalline silicon tandem solar cells. (C) 2010 Elsevier B.V. All rights reserved. |