This title appears in the Scientific Report :
2012
Please use the identifier:
http://dx.doi.org/10.1063/1.4754112 in citations.
Please use the identifier: http://hdl.handle.net/2128/7805 in citations.
Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry
Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry
By combining structural and chemical thin film analysis with detailed plume diagnostics and modeling of the laser plume dynamics, we are able to elucidate the different physical mechanisms determining the stoichiometry of the complex oxides model material SrTiO3 during pulsed laser deposition. Devia...
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Personal Name(s): | Wicklein, S. |
---|---|
Sambri, A. / Amoruso, S. / Wang, X. / Bruzzese, R. / Koehl, A. / Dittmann, R. | |
Contributing Institute: |
JARA-FIT; JARA-FIT Elektronische Materialien; PGI-7 |
Published in: | Applied physics letters, 101 (2012) S. 131601 |
Imprint: |
Melville, NY
American Institute of Physics
2012
|
Physical Description: |
131601 |
DOI: |
10.1063/1.4754112 |
Document Type: |
Journal Article |
Research Program: |
Unlocking research potential for multifunctional advanced materials and nanoscale phenomena Grundlagen für zukünftige Informationstechnologien |
Series Title: |
Applied Physics Letters
101 |
Subject (ZB): | |
Link: |
Get full text Published under German "Allianz" Licensing conditions on 2012-09-24. Available in OpenAccess from 2012-09-24 |
Publikationsportal JuSER |
Please use the identifier: http://hdl.handle.net/2128/7805 in citations.
By combining structural and chemical thin film analysis with detailed plume diagnostics and modeling of the laser plume dynamics, we are able to elucidate the different physical mechanisms determining the stoichiometry of the complex oxides model material SrTiO3 during pulsed laser deposition. Deviations between thin film and target stoichiometry are basically a result of two effects, namely, incongruent ablation and preferential scattering of lighter ablated species during their motion towards the substrate in the O-2 background gas. On the one hand, a progressive preferential ablation of the Ti species with increasing laser fluence leads to a regime of Ti-rich thin film growth at larger fluences. On the other hand, in the low laser fluence regime, a more effective scattering of the lighter Ti plume species results in Sr rich films. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4754112] |