This title appears in the Scientific Report :
2009
Please use the identifier:
http://dx.doi.org/10.1016/j.fusengdes.2008.11.053 in citations.
Industrial scale 10 um W coating of CFC tiles for the ITER-like Wall project at JET
Industrial scale 10 um W coating of CFC tiles for the ITER-like Wall project at JET
As a result of the R&D phase of the ITER-like Wall Project, combined magnetron sputtering and ion implantation (CMSII) technique was selected for 10 mu m W coating of approx. 1000 CFC tiles for the new JET first wall. This technique involves simultaneous magnetron sputtering and high energy ion...
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Personal Name(s): | Ruset, C. |
---|---|
Grigore, E. / Greuner, H. / Maier, H. / Hopf, C. / Philipps, V. / Matthews, G. | |
Contributing Institute: |
Plasmaphysik; IEF-4 |
Published in: | Fusion engineering and design, 84 (2009) |
Imprint: |
New York, NY [u.a.]
Elsevier
2009
|
DOI: |
10.1016/j.fusengdes.2008.11.053 |
Document Type: |
Journal Article |
Research Program: |
Fusion |
Series Title: |
Fusion Engineering and Design
84 |
Subject (ZB): | |
Publikationsportal JuSER |
As a result of the R&D phase of the ITER-like Wall Project, combined magnetron sputtering and ion implantation (CMSII) technique was selected for 10 mu m W coating of approx. 1000 CFC tiles for the new JET first wall. This technique involves simultaneous magnetron sputtering and high energy ion bombardment. A high voltage pulse discharge is superposed over the magnetron deposition and by this way positive ions are accelerated, bombarding initially the substrate and then the coating itself during its growth. Based on this method, industrial equipment with a deposition chamber of Phi 800 mm x 750 mm and 24 magnetrons was designed, manufactured and commissioned. The coating productivity is about 1 m(2)/week. Tungsten coatings with a thickness of up to 17 mu m and multilayer structures Mo/W/Mo/W with a thickness of similar to 25 mu m were produced and successfully tested at 100 pulses of 16.5 MW/m(2) for 1.5 s. (C) 2008 C. Ruset. Published by Elsevier B.V. All rights reserved. |