This title appears in the Scientific Report :
2014
Please use the identifier:
http://dx.doi.org/10.1139/cjp-2013-0555 in citations.
Influence of hydrogen concentration on void-related microstructure in low hydrogen amorphous and crystalline silicon materials
Influence of hydrogen concentration on void-related microstructure in low hydrogen amorphous and crystalline silicon materials
The influence of implanted hydrogen (up to a concentration level of 3 at. %) on the microstructure of silicon (Si) materials is investigated by Fourier transform infrared spectroscopy as well as by effusion of hydrogen and of (low dose) implanted helium. Three materials of low original hydrogen conc...
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Personal Name(s): | Beyer, W. (Corresponding Author) |
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Breuer, U. / Carius, R. / Hilgers, W. / Lennartz, D. / Maier, F. C. / Nickel, N. H. / Pennartz, F. / Prunici, P. / Zastrow, U. | |
Contributing Institute: |
Analytik; ZEA-3 Photovoltaik; IEK-5 |
Published in: | Canadian journal of physics, 92 (2014) 7/8, S. 700 - 704 |
Imprint: |
Ottawa, Ontario
NRC Research Press
2014
|
DOI: |
10.1139/cjp-2013-0555 |
Document Type: |
Journal Article |
Research Program: |
Thin Film Photovoltaics |
Publikationsportal JuSER |
The influence of implanted hydrogen (up to a concentration level of 3 at. %) on the microstructure of silicon (Si) materials is investigated by Fourier transform infrared spectroscopy as well as by effusion of hydrogen and of (low dose) implanted helium. Three materials of low original hydrogen concentration, crystalline Si, electron beam evaporated amorphous Si, and plasma-deposited hydrogenated amorphous Si (using high deposition temperature) were investigated. Significant differences between crystalline and amorphous materials were observed. In crystalline Si, implanted hydrogen is found to generate multivacancies that trap diffusing helium while this is not the case in amorphous Si. Accordingly, cavities where hydrogen is located in amorphous Si must be smaller than divacancies. Those cavities in amorphous Si, present from the growth process, that trap helium tend to disappear when the implanted hydrogen concentration increases. Annealing of the materials up to temperatures of 575 °C was also studied. No significant change in the density of voids (trapping helium) occur but in case of crystalline Si the bonding sites of hydrogen as well as the diffusion paths of helium change. |