This title appears in the Scientific Report :
2011
Please use the identifier:
http://dx.doi.org/10.1002/pssa.201001139 in citations.
A silicon-based multi-sensor chip for monitoring of fermentation processes
A silicon-based multi-sensor chip for monitoring of fermentation processes
This paper describes the design and characterization of a silicon based sensor chip for monitoring of fermentation processes. The sensor chip consists of three sensors using different transducer principles. A capacitive electrolyte-insulator-semiconductor (EIS) field-effect structure with Ta2O5 as g...
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Personal Name(s): | Bäcker, M. |
---|---|
Pouyeshman, S. / Schnitzler, T. / Poghossian, A. / Wagner, P. / Biselli, M. / Schöning, M.J. | |
Contributing Institute: |
JARA-FIT; JARA-FIT Bioelektronik; PGI-8 |
Published in: | Physica status solidi / A, 208 (2011) S. 1364 - 1369 |
Imprint: |
Weinheim
Wiley-VCH
2011
|
Physical Description: |
1364 - 1369 |
DOI: |
10.1002/pssa.201001139 |
Document Type: |
Journal Article |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Series Title: |
Physica Status Solidi A
208 |
Subject (ZB): | |
Publikationsportal JuSER |
This paper describes the design and characterization of a silicon based sensor chip for monitoring of fermentation processes. The sensor chip consists of three sensors using different transducer principles. A capacitive electrolyte-insulator-semiconductor (EIS) field-effect structure with Ta2O5 as gate material was utilized as pH sensor. An electrolyte conductivity sensor was realized by measuring the impedance between two interdigitated electrodes (IDE). A platinum thermistor was included for temperature measurements. The EIS sensor was integrated into a bioreactor and successfully used for an inline pH measurement. The layout of the IDE has been optimized with respect to a high cell constant and a wide detectable conductivity range. The integrated platinum thermistor allowed for temperature compensation of the electrolyte conductivity measurement. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim |