This title appears in the Scientific Report :
2011
Please use the identifier:
http://dx.doi.org/10.1016/j.bios.2010.12.006 in citations.
An array of field-effect nanoplate SOI capacitors for (bio-)chemical sensing
An array of field-effect nanoplate SOI capacitors for (bio-)chemical sensing
An array of individually addressable nanoplate field-effect capacitive (bio-)chemical sensors based on an SOI (silicon-on-insulator) structure has been developed. The isolation of the individual capacitors was achieved by forming a trench in the top Si layer with a thickness of 350 nm. The realized...
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Personal Name(s): | Abouzar, M.H. |
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Poghossian, A. / Pedraza, A.M. / Gandhi, D. / Ingebrandt, S. / Moritz, W. / Schöning, M.J. | |
Contributing Institute: |
JARA-FIT; JARA-FIT Bioelektronik; PGI-8 |
Published in: | Biosensors and bioelectronics, 26 (2011) S. 3023 - 3028 |
Imprint: |
Amsterdam [u.a.]
Elsevier Science
2011
|
Physical Description: |
3023 - 3028 |
PubMed ID: |
21193303 |
DOI: |
10.1016/j.bios.2010.12.006 |
Document Type: |
Journal Article |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Series Title: |
Biosensors & Bioelectronics
26 |
Subject (ZB): | |
Publikationsportal JuSER |
An array of individually addressable nanoplate field-effect capacitive (bio-)chemical sensors based on an SOI (silicon-on-insulator) structure has been developed. The isolation of the individual capacitors was achieved by forming a trench in the top Si layer with a thickness of 350 nm. The realized sensor array allows addressable biasing and electrical readout of multiple nanoplate EISOI (electrolyte-insulator-silicon-on-insulator) capacitive biosensors on the same SOI chip as well as differential-mode measurements. The feasibility of the proposed approach has been demonstrated by realizing sensors for the pH and penicillin concentration detection as well as for the label-free electrical monitoring of polyelectrolyte multilayers formation and DNA (deoxyribonucleic acid)-hybridization event. A potential change of ∼ 120 mV has been registered after the DNA hybridization for the sensor immobilized with perfectly matched single-strand DNA, while practically no signal changes have been observed for a sensor with fully mismatched DNA. The realized examples demonstrate the potential of the nanoplate SOI capacitors as a new basic structural element for the development of different types of field-effect biosensors. |