This title appears in the Scientific Report :
2012
Using ALD and AVD-techniques for scaled gate stacks
Using ALD and AVD-techniques for scaled gate stacks
Saved in:
Personal Name(s): | Schäfer, A. |
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Tiedemann, A. / Nichau, A. / Lupták, R. / Mußmann, V. / Schubert, J. / Mantl, S. | |
Contributing Institute: |
JARA-FIT; JARA-FIT Halbleiter-Nanoelektronik; PGI-9 |
Published in: |
Wilhelm and Else Heraeus Physics School: Microelectronics for Society: "More than Moore" expands "More Moore |
Imprint: |
2012
|
Conference: | Bad Honnef 2012-06-10 |
Document Type: |
Poster |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Publikationsportal JuSER |
Description not available. |