This title appears in the Scientific Report :
2003
Please use the identifier:
http://hdl.handle.net/2128/1049 in citations.
Please use the identifier: http://dx.doi.org/10.1103/PhysRevB.67.045312 in citations.
Microtwinning in microcrystalline silicon and its effect on grain-size measurements
Microtwinning in microcrystalline silicon and its effect on grain-size measurements
Microcrystalline silicon grown by plasma-enhanced chemical vapor deposition consists of a phase mixture of amorphous silicon and submicrometer sized columnar crystalline silicon grains. These grains do not exhibit perfect translational symmetry but show a high density of microtwins, evidenced by str...
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Personal Name(s): | Houben, L. |
---|---|
Luysberg, M. / Carius, R. | |
Contributing Institute: |
Mikrostrukturforschung; IFF-IMF Institut für Photovoltaik; IPV |
Published in: | Physical Review B Physical review / B, 67 67 (2003 2003) 4 4, S. 045312 045312 |
Imprint: |
College Park, Md.
APS
2003
|
Physical Description: |
045312 |
DOI: |
10.1103/PhysRevB.67.045312 |
Document Type: |
Journal Article |
Research Program: |
Kondensierte Materie Photovoltaik |
Series Title: |
Physical Review B
67 |
Subject (ZB): | |
Link: |
Get full text OpenAccess |
Publikationsportal JuSER |
Please use the identifier: http://dx.doi.org/10.1103/PhysRevB.67.045312 in citations.
Microcrystalline silicon grown by plasma-enhanced chemical vapor deposition consists of a phase mixture of amorphous silicon and submicrometer sized columnar crystalline silicon grains. These grains do not exhibit perfect translational symmetry but show a high density of microtwins, evidenced by structural investigations by use of transmission electron microscopy and x-ray diffraction. The high twin fault density of typically every tenth {111} bilayer leads to anisotropic size broadening effects for Bragg reflection peaks. This anisotropic behavior of size broadening interferes with grain-size and strain measurements from x-ray diffractograms. Experimentally measured apparent grain sizes are up to a few ten nanometers and are subject to significant scatter due to the effect of microtwinning. Numerical modeling of the shape of Bragg reflection peaks is presented for the two characteristic modifications of microtwinning, i.e., lamellar and random twinning, to assess quantitatively the effect of microtwinning on size broadening and grain-size measurements from Bragg reflection width. |