This title appears in the Scientific Report :
2002
Thin low-temperature gate oxides for vertical field-effect transistors
Thin low-temperature gate oxides for vertical field-effect transistors
Saved in:
Personal Name(s): | Goryll, M. |
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Moers, J. / Trellenkamp, S. / Vescan, L. / Marso, M. / Kordos, P. / Lüth, H. | |
Contributing Institute: |
Institut für Halbleiterschichten und Bauelemente; ISG-1 |
Published in: |
ASDAM 2002 |
Imprint: |
2002
|
Conference: | Smolenice (Slovakia) 2002-10-14 |
Document Type: |
Conference Presentation |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Publikationsportal JuSER |
Description not available. |