This title appears in the Scientific Report :
2002
Patterning of 25 nm wide silicon webs with an aspect ratio of 13
Patterning of 25 nm wide silicon webs with an aspect ratio of 13
Saved in:
Personal Name(s): | Trellenkamp, S. |
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Moers, J. / van der Hart, A. / Kordos, P. / Lüth, H. | |
Contributing Institute: |
Institut für Halbleiterschichten und Bauelemente; ISG-1 |
Published in: |
Micro- and Nanoengeneering 2002 |
Imprint: |
2002
|
Conference: | Lugano (CH) 2002-09-16 |
Document Type: |
Poster |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Publikationsportal JuSER |
Description not available. |