This title appears in the Scientific Report :
2002
Process steps for a double gate MOSFET with vertical layout
Process steps for a double gate MOSFET with vertical layout
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Personal Name(s): | Trellenkamp, S. |
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Moers, J. / van der Hart, A. / Kordos, P. / Lüth, H. | |
Contributing Institute: |
Institut für Halbleiterschichten und Bauelemente; ISG-1 |
Published in: |
ASDAM 2002 Conference proceedings / ed. by J. Breza ... - 0-7803-7276-X. - S. 271 - 274 |
Imprint: |
2002
|
ISBN: |
0-7803-7276-X |
Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Publikationsportal JuSER |
Description not available. |