This title appears in the Scientific Report :
2000
Deposition of BST thin films in a multi-wafer MOCVD reactor
Deposition of BST thin films in a multi-wafer MOCVD reactor
Saved in:
Personal Name(s): | Ehrhart, P. |
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Fitsilis, F. / Regnery, S. / Waser, R. / Schienle, F. / Schumacher, M. / Lindner, J. / Dauelsberg, M. / Strzyzewski, P. / Jürgensen, H. | |
Contributing Institute: |
Institut für Festkörperforschung; IFF |
Published in: |
12th International Symposium on Integrated Ferroelectrics |
Imprint: |
2000
|
Conference: | Aachen 2000-03-12 |
Document Type: |
Poster |
Research Program: |
Festkörperforschung für die Informationstechnik |
Publikationsportal JuSER |
Description not available. |