This title appears in the Scientific Report :
2002
Integration, electrical and elctromechanical properties of PZT and PMN-Pt thin films for MEMS applications
Integration, electrical and elctromechanical properties of PZT and PMN-Pt thin films for MEMS applications
Saved in:
Personal Name(s): | Kügeler, C. |
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Hoffmann, M. / Böttger, U. / Waser, R. | |
Contributing Institute: |
Elektrokeramische Materialien; IFF-EKM |
Published in: |
9th International Symposium on Smart Structures and Materials : SPIE |
Imprint: |
2002
|
Conference: | San Diego, CA |
Document Type: |
Conference Presentation |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Publikationsportal JuSER |
Description not available. |