This title appears in the Scientific Report :
2002
Integration, electrical and electromechanical properties of PZT and PMN-Pt thin films for MEMS applications
Integration, electrical and electromechanical properties of PZT and PMN-Pt thin films for MEMS applications
Saved in:
Personal Name(s): | Kügeler, C. |
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Hoffmann, M. / Böttger, U. / Waser, R. | |
Contributing Institute: |
Elektrokeramische Materialien; IFF-EKM |
Published in: |
Smart Structures and Materials 2002 : Active Materials: Behavior and Mechanics / ed.: C. S. Lynch. - Bellingham, Wash., 2002. - (Proceedings of the SPIE ; 4699). - 0-8194-4447-2. - S. 114 - 123 |
Imprint: |
2002
|
ISBN: |
0-8194-4447-2 |
Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Publikationsportal JuSER |
Description not available. |