This title appears in the Scientific Report :
2002
Please use the identifier:
http://dx.doi.org/10.1002/1521-4109(200207)14:13<955::AID-ELAN955>3.0.CO;2-# in citations.
Evaluation of a chip-based thin-film/thick-film sensor hybrid for (bio-)chemical analysis
Evaluation of a chip-based thin-film/thick-film sensor hybrid for (bio-)chemical analysis
Both a pH-sensitive thin-film sensor and a thick-film reference electrode have been integrated into a hybrid sensor module that is suitable for (bio-)chemical analysis in aqueous solutions. The pH-sensitive thin-film sensor consists of a capacitive layer structure of Al/p-Si/SiO2/Al2O3 and is prepar...
Saved in:
Personal Name(s): | Schöning, M. J. |
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Simonis, A. / Krings, T. / Lüth, H. / Wang, J. | |
Contributing Institute: |
Institut für Bio- und Chemosensoren; ISG-2 |
Published in: | Electroanalysis, 14 (2002) S. 955 |
Imprint: |
Weinheim
Wiley-VCH-Verl.
2002
|
Physical Description: |
955 |
DOI: |
10.1002/1521-4109(200207)14:13<955::AID-ELAN955>3.0.CO;2-# |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Electroanalysis
14 |
Subject (ZB): | |
Publikationsportal JuSER |
Both a pH-sensitive thin-film sensor and a thick-film reference electrode have been integrated into a hybrid sensor module that is suitable for (bio-)chemical analysis in aqueous solutions. The pH-sensitive thin-film sensor consists of a capacitive layer structure of Al/p-Si/SiO2/Al2O3 and is prepared by semi conductor-compatible process steps. The thick-film reference electrode of p-Si/Ag/AgCl is printed by conventional screen-printed technique onto the same silicon substrate. Such combination of the thin-film sensor and the thick-film reference allows the realization of a miniaturized sensor hybrid without an external macroscopic reference electrode. Due to its set-up, the sensor hybrid shows a response characteristic to both H+- and Cl--ions and can be employed in well-defined analytes, like for biomedical applications. The utility of the new thin-film / thick-film sensor hybrid is demonstrated for the determination of the H+- and Cl--ion concentration in aqueous solutions. |