This title appears in the Scientific Report :
2002
Micro- and nanopatterning of sensor chips by means of macroporous silicon
Micro- and nanopatterning of sensor chips by means of macroporous silicon
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Personal Name(s): | Kurowski, A. |
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Schultze, J. / Lüth, H. / Schöning, M. J. | |
Contributing Institute: |
Institut für Bio- und Chemosensoren; ISG-2 |
Published in: |
Sensors and actuators |
Imprint: |
Amsterdam [u.a.]
Elsevier Science
2002
|
Physical Description: |
123 |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Sensors and Actuators B
83 |
Publikationsportal JuSER |
Description not available. |