This title appears in the Scientific Report : 2015 

Multi-parameter sensing using high-k oxide of barium strontium titanate
Huck, Christina
Poghossian, Arshak (Corresponding author) / Bäcker, Matthias / Reisert, Steffen / Kramer, Friederike / Begoyan, Vardges K. / Buniatyan, Vahe V. / Schöning, Michael J. (Corresponding author)
Bioelektronik; PGI-8
Physica status solidi / A, 212 (2015) 6, S. 1254 - 1259
2015
10.1002/pssa.201431911
Journal Article
Controlling Configuration-Based Phenomena
Please use the identifier: http://dx.doi.org/10.1002/pssa.201431911 in citations.
High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors. In this work, a Si-based sensor chip containing Pt interdigitated electrodes covered with a thin BST layer (485 nm) has been developed for multi-parameter chemical sensing. The chip has been applied for the contactless measurement of the electrolyte conductivity, the detection of adsorbed charged macromolecules (positively charged polyelectrolytes of polyethylenimine) and the concentration of hydrogen peroxide (H2O2) vapor. The experimental results of functional testing of individual sensors are presented. The mechanism of the BST sensitivity to charged polyelectrolytes and H2O2 vapor has been proposed and discussed.