This title appears in the Scientific Report :
2001
Influence of the measurement parameters on the reliability of ferroelectric thin films
Influence of the measurement parameters on the reliability of ferroelectric thin films
The fatigue behavior of PZT thin films was investigated. The fatigue excitation signal was changed with respect to the shape, the amplitude, and the frequency of the signal. It is shown that the fatigue excitation signal has a strong influence on the fatigue behavior of the films. Additionally, elec...
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Personal Name(s): | Grossmann, M. |
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Lohse, O. / Bolten, D. / Böttger, U. / Waser, R. / Tiedke, S. / Schmitz, T. / Kall, U. / Kastner, M. / Schindler, G. / Hartner, W. | |
Contributing Institute: |
Elektrokeramische Materialien; IFF-EKM |
Published in: | Integrated ferroelectrics, 32 (2001) S. 1 - 9 |
Imprint: |
London [u.a.]
Taylor & Francis
2001
|
Physical Description: |
1 - 9 |
Document Type: |
Journal Article |
Research Program: |
Festkörperforschung für die Informationstechnik |
Series Title: |
Integrated Ferroelectrics
32 |
Subject (ZB): | |
Publikationsportal JuSER |
The fatigue behavior of PZT thin films was investigated. The fatigue excitation signal was changed with respect to the shape, the amplitude, and the frequency of the signal. It is shown that the fatigue excitation signal has a strong influence on the fatigue behavior of the films. Additionally, electrical characterization of a single 1 mum(2) SBT capacitor is reported. |